Technical Support: 214-676-3474
Sales: 214-957-0295

CONTAMINATION REMOVAL & CONTROL PRODUCTS

Chuck Cleaning Wafers

Silicon wafers coated with proprietary polymer that picks up particulate contamination from tool wafer chucks. Run in production mode to eliminate tool downtime.

RetClean

Quartz reticle blank coated with proprietary polymer that picks up particulate contamination from tool reticle stages. Run in production mode to eliminate tool downtime.

PDS Reticle Inspection Unit

Reticle inspection tool to find and classify defects from 1 micron to 100 microns in size. Can be configured as a bench top unit or stocker upgrade.

RetSweep

Reticle stocker upgrade that automatically and gently blows dust off reticle’s glass-side when reticle is loaded and unloaded to/from stocker. Does not interface with tool software. Particles removed from stocker.

LASERS, POWER SUPPLIES & ANCILLARY PRODUCTS

Argon-ion Lasers

30mW & 75mW argon-ion lasers, refurbished.

12 month warranty.

Laser Power Supplies

Laser power supplies, refurbished, for 30mW & 75mW argon-ion lasers.

12 month warranty.

Intelli-Lase

Device that captures critical laser system data while operating in customer’s tool, and delivers the data via internet. Allows customer to monitor lasers on-line, set up alerts, and assists in prediction of laser end-of-life, etc. Low cost and simple to install

Puma 5000 Attenuator

Beam line attenuators refurbished, tuned, and warranted to OEM specification.