CONTAMINATION REMOVAL & CONTROL PRODUCTS
Chuck Cleaning Wafers
Silicon wafers coated with proprietary polymer that picks up particulate contamination from tool wafer chucks. Run in production mode to eliminate tool downtime.
RetClean
Quartz reticle blank coated with proprietary polymer that picks up particulate contamination from tool reticle stages. Run in production mode to eliminate tool downtime.
PDS Reticle Inspection Unit
Reticle inspection tool to find and classify defects from 1 micron to 100 microns in size. Can be configured as a bench top unit or stocker upgrade.
RetSweep
Reticle stocker upgrade that automatically and gently blows dust off reticle’s glass-side when reticle is loaded and unloaded to/from stocker. Does not interface with tool software. Particles removed from stocker.
LASERS, POWER SUPPLIES & ANCILLARY PRODUCTS
Argon-ion Lasers
30mW & 75mW argon-ion lasers, refurbished.
12 month warranty.
Laser Power Supplies
Laser power supplies, refurbished, for 30mW & 75mW argon-ion lasers.
12 month warranty.
Intelli-Lase
Device that captures critical laser system data while operating in customer’s tool, and delivers the data via internet. Allows customer to monitor lasers on-line, set up alerts, and assists in prediction of laser end-of-life, etc. Low cost and simple to install
Puma 5000 Attenuator
Beam line attenuators refurbished, tuned, and warranted to OEM specification.